Aging of Al thin film extreme ultraviolet filters

Karel Kolacek; Alexandr Frolov; Jiri Schmidt; Jaroslav Straus; Petr Hoffer; Vitaliy Stelmashuk; Petr Lukes; Libor Juha

doi:10.1117/12.2521988

24 April 2019 Aging of Al thin film extreme ultraviolet filters

Karel Kolacek, Alexandr Frolov, Jiri Schmidt, Jaroslav Straus, Petr Hoffer, Vitaliy Stelmashuk, Petr Lukes, Libor Juha

Proceedings Volume 11035, Optics Damage and Materials Processing by EUV/X-ray Radiation VII; 110350O (2019) https://doi.org/10.1117/12.2521988
Event: SPIE Optics + Optoelectronics, 2019, Prague, Czech Republic

Abstract

Thin film Al filters, very popular for their high transmittance in the wavelength range 17 to 67 nm and simultaneously low transmittance in the visible and near UV region, are prone to oxidation. The amorphous Al2O3 layers on the Al surfaces have much smaller transmittance than the bulk Al material, and, therefore, they strongly influence the total transmittance of the filter. This paper gives not only the transmittance of very old Al filters, but also maps the transmittance development of Al filters in two years span since their delivery in not controlled atmosphere. Surprisingly, it turned out that while the transmission of surface layers (present on filters since the very beginning) slightly increases with time, the average attenuation rate per unit filter thickness of the bulk material (Al) with time dramatically rises.

Conference Presentation

Citation Download Citation

Karel Kolacek, Alexandr Frolov, Jiri Schmidt, Jaroslav Straus, Petr Hoffer, Vitaliy Stelmashuk, Petr Lukes, and Libor Juha "Aging of Al thin film extreme ultraviolet filters", Proc. SPIE 11035, Optics Damage and Materials Processing by EUV/X-ray Radiation VII, 110350O (24 April 2019); https://doi.org/10.1117/12.2521988

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