Polydimethylsiloxane optical microring resonator by nano-imprint lithography on MgF2 substrate

Bingjie Chen; Ligang Huang; Leilei Shi; Tao Zhu

doi:10.1117/12.2522923

14 February 2019 Polydimethylsiloxane optical microring resonator by nano-imprint lithography on MgF₂ substrate

Bingjie Chen, Ligang Huang, Leilei Shi, Tao Zhu

Proceedings Volume 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018); 110484O (2019) https://doi.org/10.1117/12.2522923
Event: 17th International Conference on Optical Communications and Networks (ICOCN2018), 2018, Zhuhai, China

Abstract

A new type of polydimethylsiloxane (PDMS) optical microring resonator on MgF₂ substrate is proposed and fabricated by nano-imprint lithography. The measured quality factors of the resonators were in the order of 10₄ in the C band. Our work provides a new method for fabrication of on-chip whispering gallery mode resonators, which can benefit the applications in communication and sensing fields.

Citation Download Citation

Bingjie Chen, Ligang Huang, Leilei Shi, and Tao Zhu "Polydimethylsiloxane optical microring resonator by nano-imprint lithography on MgF₂ substrate", Proc. SPIE 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018), 110484O (14 February 2019); https://doi.org/10.1117/12.2522923

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