Presentation
9 March 2020 Photodiodes for Si photonics (Conference Presentation)
Joe C. Campbell, Andreas Beling
Author Affiliations +
Proceedings Volume 11286, Optical Interconnects XX; 1128609 (2020) https://doi.org/10.1117/12.2548187
Event: SPIE OPTO, 2020, San Francisco, California, United States
Abstract
High-speed high-power photodiodes are key components in microwave photonic applications including antenna remoting, generation of microwave signals, and analog optical links. With the rapid emergence of Si photonics, it is becoming increasing important to develop approaches to incorporate these photodiodes into a Si platform. For integration of III-V photodiodes on silicon, various integration approaches have been reported, including adhesive wafer bonding, direct molecular wafer bonding, and direct III-V material growth on Si. This paper will report the integration of InGaAs/InGaAsP/InP modified uni-traveling carrier photodiodes using each of these techniques. In addition, high-power Ge on Si photodiodes will be discussed.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joe C. Campbell and Andreas Beling "Photodiodes for Si photonics (Conference Presentation)", Proc. SPIE 11286, Optical Interconnects XX, 1128609 (9 March 2020); https://doi.org/10.1117/12.2548187
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KEYWORDS
Photodiodes

Silicon

Photonics

Silicon photonics

Wafer bonding

Analog electronics

Antennas

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