Multi-layer stacks of GaN/n-Al0.5GaN self-assembled quantum dots grown by metal-organic chemical vapor deposition

Fei Wu; Zhiqiang Qi

doi:10.1117/12.2547648

18 December 2019 Multi-layer stacks of GaN/n-Al_0.5GaN self-assembled quantum dots grown by metal-organic chemical vapor deposition

Fei Wu, Zhiqiang Qi

Author Affiliations +

Proceedings Volume 11334, AOPC 2019: Optoelectronic Devices and Integration; and Terahertz Technology and Applications; 1133413 (2019) https://doi.org/10.1117/12.2547648
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China

Abstract

The growth of multi-layer stacks of GaN QDs on n-doped Al_0.5GaN template by metal organic chemical vapor phase deposition has been investigated. A two-step growth technique consisting of a low temperature method and high temperature method has been employed to deposit the n-Al_0.5GaN spacer-layer over GaN QDs. The third-layer GaN quantum dots with 22nm low temperature and 15nm high temperature Al_0.5GaN spacer-layer show uniform-size and excellent optical performance. The photo-luminescence suggests that the peak intensity of GaN QDs with two-step grown spacer-layer has been overall enhanced significantly compared to the low temperature grown spacer-layer with the same thickness.

Citation Download Citation

Fei Wu and Zhiqiang Qi "Multi-layer stacks of GaN/n-Al_0.5GaN self-assembled quantum dots grown by metal-organic chemical vapor deposition", Proc. SPIE 11334, AOPC 2019: Optoelectronic Devices and Integration; and Terahertz Technology and Applications, 1133413 (18 December 2019); https://doi.org/10.1117/12.2547648

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