Paper
13 December 2020 Photonic integrated circuit for absolute metrology
Richard Kendrick, Joseph Marron, Renan Moreira, Matt Jacob-Mitos
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Abstract
Absolute metrology techniques have been proposed for and used in a variety of optical systems as a means of precisely measuring distances. Typically the metrology concepts utilize frequency stabilized multiple wavelength lasers. We describe a multi-wavelength approach that utilizes the strengths of Photonic Integrated Circuits (PIC) to implement an absolute metrology sensor. The metrology sensor is a self-contained system that forms a multi-wavelength distance measuring interferometer. The PIC includes the waveguide circuitry, laser source, detectors and a National Institute of Standards and Technology (NIST) traceable reference in a compact form. The PIC is a hybrid combination of Indium Phosphide circuitry with active elements (detectors and laser) and a passive Silicon Nitride circuit of waveguides. The PIC implementation is presented along with measurement results showing an unambiguous range of 30 mm with nanometer precision.
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richard Kendrick, Joseph Marron, Renan Moreira, and Matt Jacob-Mitos "Photonic integrated circuit for absolute metrology", Proc. SPIE 11451, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation IV, 1145129 (13 December 2020); https://doi.org/10.1117/12.2557569
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KEYWORDS
Photonic integrated circuits

Metrology

Distance measurement

Sensors

Integrated optics

Interferometers

Laser metrology

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