Diamond Synthesis By DC Plasma Jet CVD

M. Kawarada; K. Kurihara; K. Sasaki; A. Teshima; K. Koshino

doi:10.1117/12.962059

15 January 1989 Diamond Synthesis By DC Plasma Jet CVD

M. Kawarada, K. Kurihara, K. Sasaki, A. Teshima, K. Koshino

Proceedings Volume 1146, Diamond Optics II; (1989) https://doi.org/10.1117/12.962059
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

We developed a high-speed diamond synthesis technique called DIA-JET process that uses a DC plasma jet. Diamond is made by spraying the plasma jet (generated from the DC arc discharge) onto a water-cooled substrate. After examining the film with X-ray diffraction, Vickers hardness, and Raman scattering, we found that the quality approximated that of natural diamond. This paper describes the properties of the plasma jet and the synthesized diamond.

Citation Download Citation

M. Kawarada, K. Kurihara, K. Sasaki, A. Teshima, and K. Koshino "Diamond Synthesis By DC Plasma Jet CVD", Proc. SPIE 1146, Diamond Optics II, (15 January 1989); https://doi.org/10.1117/12.962059

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