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We evaluated the effect on the beam image from an x-ray plane mirror and some kinds of an x-ray window by grating interferometer at wavelength and off-line metrology in order to improve the uniformity of the x-ray. Based on wave optical simulation the figure error of the plane mirror was improved in specific spatial wavelength and the additional polished mirror has been succeeded in reduction of the fluctuation as estimated. In this paper we report the current status and discuss specification of total reflection mirror and x-ray window aiming at x-ray beamline optics in the next generation light source.
Yasunori Senba,Hirokatsu Yumoto,Takahisa Koyama,Takanori Miura,Hikaru Kishimoto,Yasuhiro Shimizu,Hiroshi Yamazaki, andHaruhiko Ohashi
"Improvement on x-ray beam image by plane mirrors and x-ray windows for a modern x-ray beamline aiming at next generation light source", Proc. SPIE 11492, Advances in Metrology for X-Ray and EUV Optics IX, 114920J (21 August 2020); https://doi.org/10.1117/12.2570168
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Yasunori Senba, Hirokatsu Yumoto, Takahisa Koyama, Takanori Miura, Hikaru Kishimoto, Yasuhiro Shimizu, Hiroshi Yamazaki, Haruhiko Ohashi, "Improvement on x-ray beam image by plane mirrors and x-ray windows for a modern x-ray beamline aiming at next generation light source," Proc. SPIE 11492, Advances in Metrology for X-Ray and EUV Optics IX, 114920J (21 August 2020); https://doi.org/10.1117/12.2570168