Study of laser beam pointing stability measuring system based on F-theta lens

Fei Wang; Sibo Zhang; Chengshuang Zhang; Yang Gui; Yanling Bao; Changqing Liu; Ying Che; Ming Tian

doi:10.1117/12.2580283

5 November 2020 Study of laser beam pointing stability measuring system based on F-theta lens

Fei Wang, Sibo Zhang, Chengshuang Zhang, Yang Gui, Yanling Bao, Changqing Liu, Ying Che, Ming Tian

Proceedings Volume 11567, AOPC 2020: Optical Sensing and Imaging Technology; 1156742 (2020) https://doi.org/10.1117/12.2580283
Event: Applied Optics and Photonics China (AOPC 2020), 2020, Beijing, China

Abstract

Since laser beam pointing stability affects the quality and accuracy of work in areas such as laser guidance and laser processing, the paper proposes a method for measuring the laser beam pointing stability based on the linearly angle-displacement transformation characteristics of F-theta lens in order to measure the pointing stability accurately and comprehensively and evaluate the performance of the laser. The method linearly converts an angular offset into a displacement offset that can be accurately measured and evaluate the pointing stability by means of finding the minimum envelope circle. Based on this method, a laser beam pointing stability measurement system with CCD camera as image acquisition unit is built for He-Ne laser source. The experimental results show that the pointing stability of the He-Ne laser is 1.500mrad. The result is only 0.186% affected by the error, which verifies the feasibility of the measurement method and the high-precision measurement of laser beam pointing stability by the system.

Citation Download Citation

Fei Wang, Sibo Zhang, Chengshuang Zhang, Yang Gui, Yanling Bao, Changqing Liu, Ying Che, and Ming Tian "Study of laser beam pointing stability measuring system based on F-theta lens", Proc. SPIE 11567, AOPC 2020: Optical Sensing and Imaging Technology, 1156742 (5 November 2020); https://doi.org/10.1117/12.2580283

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