Optical Testing Using Laser Feedback Metrology

Peter de Groot; Gregg Gallatin; George Gardopee

doi:10.1117/12.962738

25 April 1990 Optical Testing Using Laser Feedback Metrology

Peter de Groot, Gregg Gallatin, George Gardopee

Proceedings Volume 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series; (1990) https://doi.org/10.1117/12.962738
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

The sensitivity of laser diodes to small amounts of optical feedback provides the basis for a remarkably simple and versatile tool for interferometric metrology of optical elements and systems. The tool uses a simple optical scanner and phase tracking to analyse wavefronts and is particularly useful for obtaining surface profiles of strongly aspheric mirrors. Surface profiles have been obtained to an accuracy of 100 nm in the presence of extremely high (1011/mm) departures from spherical.

Citation Download Citation

Peter de Groot, Gregg Gallatin, and George Gardopee "Optical Testing Using Laser Feedback Metrology", Proc. SPIE 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series, (25 April 1990); https://doi.org/10.1117/12.962738

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