Mid-infrared free electron laser induced periodic surface structures on semiconductors

Y. Tanaka; M. Hashida; C. Hosokawa; H. Zen; T. Nagashima; N. Ozaki; S. Inoue; S. Sakabe

doi:10.1117/12.2578026

5 March 2021 Mid-infrared free electron laser induced periodic surface structures on semiconductors

Y. Tanaka, M. Hashida, C. Hosokawa, H. Zen, T. Nagashima, N. Ozaki, S. Inoue, S. Sakabe

Proceedings Volume 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI; 116730U (2021) https://doi.org/10.1117/12.2578026
Event: SPIE LASE, 2021, Online Only

Abstract

It is known that the several-times irradiation of a short pulse laser with fluence near the ablation threshold on material induces self-organization of fine periodic surface structures (so called LIPSS: laser induced periodic surface structure) with periodic interspaces Ʌ smaller than the laser wavelength ʎ. In particular, LIPSS such as Ʌ ≪ ʎ are called “fine LIPSS”. And they are attracting much attention as a method of processing for structures finer than the diffraction limit of laser light. However, their formation mechanism has not been clarified yet. To clarify the formation mechanism of LIPSS, in-situ observation is an effective way. However, the measurement of the small periodic interspaces with fast time scale (comparable to the laser pulse duration) are the difficulties. On a way to in-situ observation, we have reported the LIPSS formation on semiconductors irradiated by mid-infrared Free-Electron Laser (MIR-FEL). Their periodic interspaces are several micrometers and therefore can be measured by visible light. In this presentation, we compared the features of LIPSSs by MIR-FEL to the several models applied to LIPSSs by near-infrared or visible light lasers. Through this discussion, we estimated the temporal resolution needed for in-situ observation.

Conference Presentation

Citation Download Citation

Y. Tanaka, M. Hashida, C. Hosokawa, H. Zen, T. Nagashima, N. Ozaki, S. Inoue, and S. Sakabe "Mid-infrared free electron laser induced periodic surface structures on semiconductors", Proc. SPIE 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI, 116730U (5 March 2021); https://doi.org/10.1117/12.2578026

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