Current status of development of electroforming process for high-precision soft x-ray mirrors

T. Kume; G. Yamaguchi; K. Hiraguri; Y. Matsuzawa; Y. Imamura; H. Miyashita; T. Saito; Y. Takeo; Y. Senba; H. Kishimoto; H. Ohashi; H. Hashizume; H. Mimura

doi:10.1117/12.2594044

21 September 2021 Current status of development of electroforming process for high-precision soft x-ray mirrors

T. Kume, G. Yamaguchi, K. Hiraguri, Y. Matsuzawa, Y. Imamura, H. Miyashita, T. Saito, Y. Takeo, Y. Senba, H. Kishimoto, H. Ohashi, H. Hashizume, H. Mimura

Author Affiliations +

Proceedings Volume 11837, Advances in X-Ray/EUV Optics and Components XVI; 1183707 (2021) https://doi.org/10.1117/12.2594044
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

In the soft x-ray region, the demand for focusing x-rays into a spot of nanometer order size with high efficiency has been increasing. Ellipsoidal and Wolter mirrors, which are representative of ideal reflective focusing optics for soft x-rays, have optical advantages such as achromaticity, large acceptance, high efficiency and high numerical aperture, which are suitable to fully utilize the next-generation synchrotron light sources. Recently, the fabrication process of soft x-ray mirrors of replication type using nickel electroforming was developed, and several focusing experiments with ellipsoidal and Wolter mirrors were reported. The experimental environment of these mirrors, however, was limited due to the magnetism of the nickel body. We are currently developing the diamagnetic mirror fabrication process using copper electroforming technique to expand its application. In order to prevent oxidization of the replicated surface, this study demonstrates electroforming of copper mirror that has the reflective surface of gold. The surface roughness replicated from a flat substrate was 0.321 nm in root-mean-square in 0.1 mm × 0.1 mm area. The circularity of the gold inner surface of a copper electroformed mirror was evaluated at 26 nm in peak-to-valley.

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Citation Download Citation

T. Kume, G. Yamaguchi, K. Hiraguri, Y. Matsuzawa, Y. Imamura, H. Miyashita, T. Saito, Y. Takeo, Y. Senba, H. Kishimoto, H. Ohashi, H. Hashizume, and H. Mimura "Current status of development of electroforming process for high-precision soft x-ray mirrors", Proc. SPIE 11837, Advances in X-Ray/EUV Optics and Components XVI, 1183707 (21 September 2021); https://doi.org/10.1117/12.2594044

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