Development of methods for the formation and control of a given distribution of the photoresist thickness for conformal correctors fabrication

Victor P. Korolkov; Ruslan K. Nasyrov; Vladimir N. Khomutov; Dmitry A. Belousov; Roman I. Kutz

doi:10.1117/12.2604808

9 October 2021 Development of methods for the formation and control of a given distribution of the photoresist thickness for conformal correctors fabrication

Victor P. Korolkov, Ruslan K. Nasyrov, Vladimir N. Khomutov, Dmitry A. Belousov, Roman I. Kutz

Author Affiliations +

Proceedings Volume 11895, Optical Design and Testing XI; 118951J (2021) https://doi.org/10.1117/12.2604808
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

Conformal correctors for high-power solid-state YAG: Nd3 + lasers are used for compensation of density variations inside active media. These correctors decrease laser beam aberrations and allows better focusing of laser light. Fabrication was done by direct laser writing on photoresist. Method of specular spectrometric reflectometry to control the shape of correctors at the stage of relief in a photoresist is considered. The combination of the methods used significantly increases the productivity of the production of correctors, combined with a reduction in the cost of the process.

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Victor P. Korolkov, Ruslan K. Nasyrov, Vladimir N. Khomutov, Dmitry A. Belousov, and Roman I. Kutz "Development of methods for the formation and control of a given distribution of the photoresist thickness for conformal correctors fabrication", Proc. SPIE 11895, Optical Design and Testing XI, 118951J (9 October 2021); https://doi.org/10.1117/12.2604808

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