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9 October 2021 Shallow-etched silicon grating waveguide based polarizing beam splitter
Haipeng Liu, Shanqin Zhuang, Shuo Yuan, YISHU CHEN, Jijun Feng
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Proceedings Volume 11898, Holography, Diffractive Optics, and Applications XI; 118981A (2021) https://doi.org/10.1117/12.2602455
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China
Abstract
A compact asymmetrical directional coupler composed of 70-nm-deep shallow etched dual grating structure waveguide and a 7.4-μm long coupling length, is proposed and fabricated to realize a broadband and high-extinction-ratio polarizing beam splitter. By carefully optimizing the structural parameters, the cross-coupling for TM light can be realized while little coupling happens for TE wave, which would have a broad application prospect for silicon-based photonics.
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Haipeng Liu, Shanqin Zhuang, Shuo Yuan, YISHU CHEN, and Jijun Feng "Shallow-etched silicon grating waveguide based polarizing beam splitter", Proc. SPIE 11898, Holography, Diffractive Optics, and Applications XI, 118981A (9 October 2021); https://doi.org/10.1117/12.2602455
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KEYWORDS
Beam splitters
Silicon
Waveguides
Directional couplers
Photonics
Silicon photonics
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