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Terahertz nondestructive testing technology is a technology widely used in samples evaluation with the merit of on-site and surface-damage free. Terahertz waves have low quantum energy and are transparent to most non-polar substances, thus, terahertz nondestructive testing has gradually become a research hotspot over the years. However when a femtosecond laser in used as a terahertz excitation source, the excess pump light in the system may cause radiation damage to the measured object. In order to eliminate the impact of residual pump light in the system on the measured object, we designed the spectral filter elements of reflect and terahertz band transmission in the wave bands of 0.80 μm and 1.56 μm, by using Nb2O5 and SiO2 as high and low refractive index materials, respectively. Then we prepared the filter membrane system electron beam evaporation through an ion beam assisted deposition. The influence of annealing process on the growth structure of the films was analyzed according to the AFM test results of Nb2O5 monolayer films under different process conditions, and the annealing process parameters were optimized to reduce the influence of surface roughness on the film spectrum. Based on the KIM vibration model (Lorentz extension model), the optical constant dispersion distributions of NB2O5 thin flims prepared under different processing conditions were accurately fitted. The influence of temperature on the refractive index and absorption of Nb2O5 thin films were analyzed. The deposition temperature was optimized to reduce the absorption of the filter in the wave bands of 0.8 μm and 1.560 μm. By using PE Lambda 1050, the reflectivity of the prepared filter in the wave bands of 0.8 μm and 1.560 μm were tested. The prepared filter was scanned by focusing point by point using a built-up transmission terahertz time domain spectral system. The transmittance of the quartz coated sample relative to the reference signal was calculated by analyzing signals in the frequency domain. The average reflectivity of the prepared spectral filter was 99.9% in both the band of 0.9 μm and 1.560 μm. The transmittance of terahertz frequency 2 THz was 68%, which was almost consistent with the theoretical design values, and could meet the requirements for the terahertz nondestructive testing system's application.
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