Three-dimensional fs-laser subtractive nanolithography of crystals

A. Ródenas; F. Paz-Buclatin; A. Casasnovas Melián; O. De Varona; L. L. Martin; I. R. Martin

doi:10.1117/12.2608613

4 March 2022 Three-dimensional fs-laser subtractive nanolithography of crystals

A. Ródenas, F. Paz-Buclatin, A. Casasnovas Melián, O. De Varona, L. L. Martin, I. R. Martin

Proceedings Volume 11989, Laser-based Micro- and Nanoprocessing XVI; 1198902 (2022) https://doi.org/10.1117/12.2608613
Event: SPIE LASE, 2022, San Francisco, California, United States

Abstract

Nanoscale structuring of hard, brittle, and high-quality cm-scale optical crystals has remained a two-dimensional surface process until the recent report that 3D architectures can be sculpted inside laser crystals (YAG and sapphire) with feature sizes on the 100 nm level and nanoscale precision. The mechanism by which these phenomena can occur is a giant wetchemical etching selectivity of around a million (~106 ) between photomodified and unmodified crystal volumes, which enables nanopores (~200 nm) to reach mm-scale lengths, discovered and recently reported by A. Ródenas et al. [1]. We report here recent results that expand the state-of-the-art on this new 3D nanolithographic technique for undoped YAG

Conference Presentation

Citation Download Citation

A. Ródenas, F. Paz-Buclatin, A. Casasnovas Melián, O. De Varona, L. L. Martin, and I. R. Martin "Three-dimensional fs-laser subtractive nanolithography of crystals", Proc. SPIE 11989, Laser-based Micro- and Nanoprocessing XVI, 1198902 (4 March 2022); https://doi.org/10.1117/12.2608613

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available