External resonator diode lasers are the appropriate choice for species detection in application areas such as medicine, climate and industry due to their excellent properties, but have limitations in terms of high detection rates and commercial availability in the MIR region. Especially in the MIR region, many molecules have particularly strong absorption bands, which can result in very low detection limits and is therefore of particular interest. In this paper, we present our new ICbased laser chips with straight and curved waveguides with a center wavelength at 3.4 μm. These are integrated into an external resonator setup and characterized. The IC-based system enables continuous wave operation at room temperature over a wavelength range of 285 nm with several mW output power. With respect to the problem of high sampling rates, one promising technique is MEMS technology integrated as a tuning element in the external resonator structure. This enables planar drive control for high-frequency resonance-driven MEMS scanners, where the sampling frequency corresponds to the resonance frequency. These will be tested for their suitability and integrated into an ECDL setup and evaluated. Our work will address new requirements in terms of tuning range, output power, and acquisition rate.
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