Impact of thermal expansion coefficient on the local tilt angle of extreme ultraviolet pellicle

Chang Soo Kim; Jung Hwan Kim; Seong Ju Wi; Ha Neul Kim; Young Woo Kang; Won Jin Kim; Jinho Ahn

doi:10.1117/12.2614355

13 June 2022 Impact of thermal expansion coefficient on the local tilt angle of extreme ultraviolet pellicle

Chang Soo Kim, Jung Hwan Kim, Seong Ju Wi, Ha Neul Kim, Young Woo Kang, Won Jin Kim, Jinho Ahn

Proceedings Volume 12051, Optical and EUV Nanolithography XXXV; 120510S (2022) https://doi.org/10.1117/12.2614355
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

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Chang Soo Kim, Jung Hwan Kim, Seong Ju Wi, Ha Neul Kim, Young Woo Kang, Won Jin Kim, and Jinho Ahn "Impact of thermal expansion coefficient on the local tilt angle of extreme ultraviolet pellicle", Proc. SPIE 12051, Optical and EUV Nanolithography XXXV, 120510S (13 June 2022); https://doi.org/10.1117/12.2614355

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