Swelling and dissolution kinetics of poly(4-hydroxystyrene) in alkaline aqueous solution studied by quartz crystal microbalance (QCM) method

Yuko Tsutsui Ito; Hitomi Betsumiya; Takahiro Kozawa; Kazuo Sakamoto; Makoto Muramatsu

doi:10.1117/12.2612781

25 May 2022 Swelling and dissolution kinetics of poly(4-hydroxystyrene) in alkaline aqueous solution studied by quartz crystal microbalance (QCM) method

Yuko Tsutsui Ito, Hitomi Betsumiya, Takahiro Kozawa, Kazuo Sakamoto, Makoto Muramatsu

Author Affiliations +

Proceedings Volume 12055, Advances in Patterning Materials and Processes XXXIX; 1205509 (2022) https://doi.org/10.1117/12.2612781
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Abstract

The dissolution (including the formation of transient swelling layer) of a resist polymer is key to the realization of ultrafine patterning. However, the details of the dissolution of resist polymers remain unclarified. In this study, the swelling and dissolution kinetics of poly(4-hydroxystyrene) (PHS) film in pure water and alkaline aqueous solution were investigated. PHS is a typical backbone polymer (a dissolution agent) of chemically amplified resists. By changing the length of alkyl chains of amines, the swelling and dissolution kinetics of PHS were observed. Their dependences on the film thickness of PHS and the concentration of amines were discussed.

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Yuko Tsutsui Ito, Hitomi Betsumiya, Takahiro Kozawa, Kazuo Sakamoto, and Makoto Muramatsu "Swelling and dissolution kinetics of poly(4-hydroxystyrene) in alkaline aqueous solution studied by quartz crystal microbalance (QCM) method", Proc. SPIE 12055, Advances in Patterning Materials and Processes XXXIX, 1205509 (25 May 2022); https://doi.org/10.1117/12.2612781

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