Author Affiliations +
Weina Shi,1 Liang Zhu,1 Yuqian Chen,2 Jiao Huang,2 Jinze Wang,2 Qian Xie,2 Bilun Zhang,2 Yunfei Xi,2 Wenhao Pan,2 Yuanxia Zheng,3 Yongfa Fan,3 Jin Cheng,3 Yu Zhao,3 Leiwu Zheng3
1ChangXin Memory Technologies, Inc. (China)
2ASML Shenzhen (China)
3ASML US, Inc. (United States)