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20 December 2022 Optimization method of one-dimensional standard calibration based on laser tracking interferometry
Xiaolei Hu, Feng Zhang, Yu Ren
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Proceedings Volume 12315, Optical Design and Testing XII; 123151S (2022) https://doi.org/10.1117/12.2653063
Event: SPIE/COS Photonics Asia, 2022, Online Only
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Abstract
In order to improve the robustness of the traditional laser tracking interferometry method and make the calibration results of the one-dimensional standard more accurate and reliable, a laser tracking interferometry calibration optimization method in multiple attitudes is proposed in this paper. The method firstly constructs a multi-stance 1D standard layout based on the traditional laser tracking interferometric length measurement, and collects measurement information under different attitudes by laser tracker, then uses a weight-based calibration result optimization strategy to optimize the combination of measurement data, and then outputs the calibration results and performs error source analysis and uncertainty assessment. The experimental analysis was carried out and compared with the CMM method, and the En value was 0.1, which verified the reasonableness of the uncertainty assessment, and the comparison with the measurement results of the CMM method showed that the calibration optimization scheme for multiple poses was more reliable than that for single poses. The optimized method provides a new calibration scheme for realizing the quantity traceability of high-precision one-dimensional standard, which has good practicality and certain guiding significance.
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Xiaolei Hu, Feng Zhang, and Yu Ren "Optimization method of one-dimensional standard calibration based on laser tracking interferometry", Proc. SPIE 12315, Optical Design and Testing XII, 123151S (20 December 2022); https://doi.org/10.1117/12.2653063
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KEYWORDS
Calibration
Laser interferometry
Laser applications
Specular reflections
Optical testing
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