Ultrafast laser platform providing dynamic peak power and energy deposition control: from laser source to industrial applications

Marc Sailer; Florian Jansen; Steffen Ruebling; Aleksander Budnicki; Axel Fehrenbacher

doi:10.1117/12.2650002

17 March 2023 Ultrafast laser platform providing dynamic peak power and energy deposition control: from laser source to industrial applications

Marc Sailer, Florian Jansen, Steffen Ruebling, Aleksander Budnicki, Axel Fehrenbacher

Author Affiliations +

Proceedings Volume 12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; 124080E (2023) https://doi.org/10.1117/12.2650002
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

Ultrashort-pulse micromachining has found a rising number of applications in numerous industrial and scientific fields. Modern ultrafast lasers like the TruMicro series enable a high degree of pulse parameter flexibility. Yet, this flexibility also brings challenges for optimization due to complexity with respect to endless parameter combinations. Unique laser features such as a fast tunable pulse duration, MHz- and GHz-bursts offer the possibility to address several machining challenges depending on the application. Even for a single application, useful pulse parameters are generally related to the particular process phase. For example, high ablation rates are commonly in contrast to highest surface qualities. In this contribution we focus on applications that benefit from multi-step processes with advanced successive parameter sequences, enabled by fast and controlled intra-process pulse parameter switching. As a result, multiple samples are demonstrated where highest processing speeds are enabled in combination with superior qualities and various surface finishes. Besides an optimized temporal energy deposition for a variety of applications, benefits of ultrafast processing with shorter wavelength, position synchronized output and an integrated hollow-core fiber delivery are demonstrated.

Conference Presentation

Citation Download Citation

Marc Sailer, Florian Jansen, Steffen Ruebling, Aleksander Budnicki, and Axel Fehrenbacher "Ultrafast laser platform providing dynamic peak power and energy deposition control: from laser source to industrial applications", Proc. SPIE 12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, 124080E (17 March 2023); https://doi.org/10.1117/12.2650002

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available