Silicon meta-APD integrated with InGaAsP meta-emitter for near-infrared (NIR) for active imaging and LIDAR

Kwong-Kit Choi; Patrick Oduor; Achyut Dutta

doi:10.1117/12.2668001

15 June 2023 Silicon meta-APD integrated with InGaAsP meta-emitter for near-infrared (NIR) for active imaging and LIDAR

Kwong-Kit Choi, Patrick Oduor, Achyut Dutta

Proceedings Volume 12514, Image Sensing Technologies: Materials, Devices, Systems, and Applications X; 1251403 (2023) https://doi.org/10.1117/12.2668001
Event: SPIE Defense + Commercial Sensing, 2023, Orlando, Florida, United States

Abstract

The detection of Nd: YAG laser emission at 1.064 microns is important for a number of applications such as active infrared imaging and space LIDAR. We propose a silicon avalanche photodiode (APD) based on micro-scaled photonic metastructures. In one approach, the metastructure contains a hexagonal hole array filled with SiO₂ to yield optical diffraction and trapping. With 3D electromagnetic modeling, we optimize the array dimensions and yield 26.0% theoretical absorption at 1.064 microns. It is 59 times larger than that of the planar structure with an additional 18% dark current reduction. In another approach, the metastructure contains a ring array fabricated on the top contact layer to excite localized surface plasmons. The theoretical QE is 52 times larger and the dark current is 8.6 times lower. In addition to active imaging and LIDAR, the present meta-APD designs are also useful for broadband passive imaging, in which I_p/I_d can be improved by 3.9 and 8.7 times, respectively. The ring metastructure can also be integrated with an InGaAsP light emitting diode to produce coherent, directional emission at 1.064 micron to further improve SWaP in active applications.

Citation Download Citation

Kwong-Kit Choi, Patrick Oduor, and Achyut Dutta "Silicon meta-APD integrated with InGaAsP meta-emitter for near-infrared (NIR) for active imaging and LIDAR", Proc. SPIE 12514, Image Sensing Technologies: Materials, Devices, Systems, and Applications X, 1251403 (15 June 2023); https://doi.org/10.1117/12.2668001

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available