New spectrometer for non-medical high-precision frequency domain optical coherence tomography

Wojtek J. Walecki

doi:10.1117/12.2660668

15 June 2023 New spectrometer for non-medical high-precision frequency domain optical coherence tomography

Wojtek J. Walecki

Author Affiliations +

Proceedings Volume 12516, Next-Generation Spectroscopic Technologies XV; 125160I (2023) https://doi.org/10.1117/12.2660668
Event: SPIE Defense + Commercial Sensing, 2023, Orlando, Florida, United States

Abstract

We present a novel cost-effective high spectral resolution and small bandwidth spectrometer for the fiber optic frequency domain optical coherence tomography (FD-OCT) for thin wafer semiconductor applications. The spectrometer employs achromatic dispersive optics. We also present a novel method for calibration of this narrow bandwidth spectrometer using a fiber optic Michelson interferometer.

Conference Presentation

Citation Download Citation

Wojtek J. Walecki "New spectrometer for non-medical high-precision frequency domain optical coherence tomography", Proc. SPIE 12516, Next-Generation Spectroscopic Technologies XV, 125160I (15 June 2023); https://doi.org/10.1117/12.2660668

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