Low loss silicon nitride photonics for short wavelengths

Hani Nejadriahi; Eric Kittlaus

doi:10.1117/12.2690344

4 October 2023 Low loss silicon nitride photonics for short wavelengths

Hani Nejadriahi, Eric Kittlaus

Proceedings Volume 12646, Metamaterials, Metadevices, and Metasystems 2023; 1264605 (2023) https://doi.org/10.1117/12.2690344
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States

Abstract

We report on development of an ultra-low loss stoichiometric silicon nitride platform for applications in wavelengths of interest to cold atom systems such as atom interferometers and clocks. Waveguide propagation loss values as low as 1.1 dB/m at λ=852 nm were achieved through a reduction in scattering and absorption losses by using a 40 nm device layer thickness and LPCVD based thermal oxide for cladding. Intrinsic Q_intrisnic=44 million and loaded Q_loaded=19 million is reported. Furthermore, we realize a tunable pair of Vernier ring filters with integrated thermo-optic tuning.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Hani Nejadriahi and Eric Kittlaus "Low loss silicon nitride photonics for short wavelengths", Proc. SPIE 12646, Metamaterials, Metadevices, and Metasystems 2023, 1264605 (4 October 2023); https://doi.org/10.1117/12.2690344

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