Closed-loop wavefront calibration of a multi-electrode electrowetting-based tunable microlens

Daniel Sauter; Hans Zappe

doi:10.1117/12.2692067

12 March 2024 Closed-loop wavefront calibration of a multi-electrode electrowetting-based tunable microlens

Daniel Sauter, Hans Zappe

Proceedings Volume 12899, MOEMS and Miniaturized Systems XXIII; 1289903 (2024) https://doi.org/10.1117/12.2692067
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

A method to calibrate multi-electrode electrowetting-driven lenses and phase-shifters based on measured wavefront feedback is presented. The aim is to compensate for wavefront errors commonly caused by processing irregularities or surface defects. The wavefront generated by the lens is measured using a Shack-Hartmann wavefront sensor to determine the surface shape. The deviation between the target surface shape is calculated and the electrode voltages are iteratively adjusted. A decentralized control algorithm is implemented which treats the meniscus height at each electrode as a variable with independent feedback control; an adaptive update condition determines which electrodes should be adjusted in each cycle.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Daniel Sauter and Hans Zappe "Closed-loop wavefront calibration of a multi-electrode electrowetting-based tunable microlens", Proc. SPIE 12899, MOEMS and Miniaturized Systems XXIII, 1289903 (12 March 2024); https://doi.org/10.1117/12.2692067

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