High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer

S. Choi; G. Hwang; S. Kheiryzadehkhanghah; I. Choi; W. Chegal; Y. Cho; D. Kim

doi:10.1117/12.3010995

9 April 2024 High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer

S. Choi, G. Hwang, S. Kheiryzadehkhanghah, I. Choi, W. Chegal, Y. Cho, D. Kim

Proceedings Volume 12955, Metrology, Inspection, and Process Control XXXVIII; 129550F (2024) https://doi.org/10.1117/12.3010995
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

Abstract

This paper describes the lateral resolution enhancement of dynamic spectroscopic imaging ellipsometer, aiming to improve its inspection capabilities. Traditional imaging ellipsometers use a rotating optical elements type scheme which typically requires longer acquisition time. Moreover, for spectroscopic applications, an extra spectral scanning mechanism is needed. The proposed system based on a one-piece polarizing interferometric module, can efficiently extract spatio-spectral ellipsometric phase maps of two-dimensional (2D) materials with a spatial resolution of a few microns at a speed of hundreds of Hz.

Conference Presentation

Citation Download Citation

S. Choi, G. Hwang, S. Kheiryzadehkhanghah, I. Choi, W. Chegal, Y. Cho, and D. Kim "High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer", Proc. SPIE 12955, Metrology, Inspection, and Process Control XXXVIII, 129550F (9 April 2024); https://doi.org/10.1117/12.3010995

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