Full-field radial-shearing differential interference contrast microscopy with Greek-ladder sieves

Yuni Zheng; Junyong Zhang

doi:10.1117/12.3005991

18 December 2023 Full-field radial-shearing differential interference contrast microscopy with Greek-ladder sieves

Yuni Zheng, Junyong Zhang

Proceedings Volume 12967, AOPC 2023: Computing Imaging Technology; 1296706 (2023) https://doi.org/10.1117/12.3005991
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China

Abstract

We propose to complete a radial shear differential interference contrast (DIC) microscope based on Greek-ladder sieves, in which three structures are set up to demonstrate the feasibility of radial shear interference phase contrast imaging. A detailed analysis and mathematical derivation is presented based on the fact that DIC contrast is spatially separated by the optical path difference of two interfering beams in a small focal volume, focusing on the optical range difference between the three structures. An important reference is provided for subsequent applications, in particular radial shear differential interference in the localisation of surface damage points and tweezers in large-scale integrated circuits.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yuni Zheng and Junyong Zhang "Full-field radial-shearing differential interference contrast microscopy with Greek-ladder sieves", Proc. SPIE 12967, AOPC 2023: Computing Imaging Technology, 1296706 (18 December 2023); https://doi.org/10.1117/12.3005991

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