Dynamic mode decomposition-based algorithm for phase-shifting interferometry in the presence of miscalibration and vibration

Rishikesh Kulkarni; Raghunandan Kalibhat

doi:10.1117/12.3014687

18 June 2024 Dynamic mode decomposition-based algorithm for phase-shifting interferometry in the presence of miscalibration and vibration

Rishikesh Kulkarni, Raghunandan Kalibhat

Author Affiliations +

Proceedings Volume 12997, Optics and Photonics for Advanced Dimensional Metrology III; 129970Z (2024) https://doi.org/10.1117/12.3014687
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

The dynamic system analysis capability of dynamic mode decomposition (DMD) technique is utilized for the phase retrieval in phase shifting interferometry. The DMD decomposes the spatio-temporal interferometric data into three distinct spatial fields (modes) which represent the background intensity and complex amplitudes associated with the interferogram. The phase estimate can be obtained from one of these modes which oscillates with a temporal frequency equal to the phase shift. Two DMD-based algorithms are reported which operate with minimum four interferograms, and accumulated phase shift of π. The comparative study among the DMD-based and the least-squares, PCA, 4-bucket, 5-bucket and 7-bucket algorithms performed in function of signal-to-noise ratio, phase-shift miscalibration, and amplitude and frequency of vibration demonstrates the suitability of proposed algorithm in practical scenarios.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Rishikesh Kulkarni and Raghunandan Kalibhat "Dynamic mode decomposition-based algorithm for phase-shifting interferometry in the presence of miscalibration and vibration", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 129970Z (18 June 2024); https://doi.org/10.1117/12.3014687

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