Fabrication of high-Q multimode microring resonators on a photonic silicon-on-insulator platform

Mircea-Traian Cătuneanu; Ahmad Echresh; Rang Li; Saif Mohd Shaik; Shiyao Fang; Bhavana Siddaveeranna Umeshaiah; Yordan Georgiev; Yonder Berencén; Artur Erbe; Shengqiang Zhou; Manfred Helm; Kambiz Jamshidi

doi:10.1117/12.3022236

18 June 2024 Fabrication of high-Q multimode microring resonators on a photonic silicon-on-insulator platform

Mircea-Traian Cătuneanu, Ahmad Echresh, Rang Li, Saif Mohd Shaik, Shiyao Fang, Bhavana Siddaveeranna Umeshaiah, Yordan Georgiev, Yonder Berencén, Artur Erbe, Shengqiang Zhou, Manfred Helm, Kambiz Jamshidi

Author Affiliations +

Proceedings Volume 13012, Integrated Photonics Platforms III; 130120S (2024) https://doi.org/10.1117/12.3022236
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Conference Poster

Abstract

This work reports on the fabrication and optimization of silicon microring resonators on SOI platforms with a focus on rapid device prototyping. Such resonators are instrumental in expanding the functionality of photonic circuits, be it by leveraging the inherent nonlinearities of silicon or by improving frequency filtering. Central to this investigation is the detailed fabrication techniques developed for SOI waveguides, specifically tailored to minimize losses. Devices are created using Electron Beam Lithography and are etched using Reactive Ion Etching. The performance of microrings with single-mode waveguides is compared with that of multimode variants, and it is shown that the latter mitigate the impact of sidewall roughness, thereby reducing scattering losses. Through optimization of the patterning parameters, etching recipes and thermal treatment, developed devices exhibit propagation losses as low as 0.28dB/cm and Q factors in the vicinity of 2×10⁵.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Mircea-Traian Cătuneanu, Ahmad Echresh, Rang Li, Saif Mohd Shaik, Shiyao Fang, Bhavana Siddaveeranna Umeshaiah, Yordan Georgiev, Yonder Berencén, Artur Erbe, Shengqiang Zhou, Manfred Helm, and Kambiz Jamshidi "Fabrication of high-Q multimode microring resonators on a photonic silicon-on-insulator platform", Proc. SPIE 13012, Integrated Photonics Platforms III, 130120S (18 June 2024); https://doi.org/10.1117/12.3022236

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