Ellipsometry of diffracted light

Josef Humlicek; Karel Vojtechovsky; Irena Drimalova; Eva Bochnickova

doi:10.1117/12.34909

1 July 1990 Ellipsometry of diffracted light

Josef Humlicek, Karel Vojtechovsky, Irena Drimalova, Eva Bochnickova

Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34909
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany

Abstract

We present studies of very rich polarization phenomena observed in the light diffracted from regular geometrical patterns. The ratio of the field amplitudes for the p-and 8-polarized light is accessible in standard ellipsometric measurements. Forward calculations based on a scalar diffraction integral predict ellipticity and phase shifts in the specular and higher-order beams. Both one- and two-dimensional patterns created in general planar filmed structures are dealt with. We identify effects related to propagation of light in the film system, i.e., to the film thicknesses and their optical properties. Characteristic features due to the in-plane geometrical arrangement are also identified, especially, the effects of the transient regions between the neighboring plane segments.

Citation Download Citation

Josef Humlicek, Karel Vojtechovsky, Irena Drimalova, and Eva Bochnickova "Ellipsometry of diffracted light", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34909

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