Holographic investigation of residual deformations induced by a pulsed ion implanter

Guillermo H. Kaufmann; Jorge N. Feugeas; B. M. Marino; Gustavo E. Galizzi

doi:10.1117/12.22177

1 July 1990 Holographic investigation of residual deformations induced by a pulsed ion implanter

Guillermo H. Kaufmann, Jorge N. Feugeas, B. M. Marino, Gustavo E. Galizzi

Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.22177
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany

Abstract

An ap1ication of holcgraphic interferartry to investigate the residual deformations izi1uc1 in nitrogen implantel specirrens by a plana focus device is reported. ExperilTental results Obtained for AISI 304 stainless steel specinns are presented.

Citation Download Citation

Guillermo H. Kaufmann, Jorge N. Feugeas, B. M. Marino, and Gustavo E. Galizzi "Holographic investigation of residual deformations induced by a pulsed ion implanter", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.22177

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