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We describe a noncontact optical microtopographer designed to map the relief of rough surfaces with resolutions in the submicron order. The principle of operation is based on the horizontal shift of a bright light spot on an horizontal surface illuminated by an oblique light beam when that surface suffers a vertical displacement. In this system the optical mecanical and electrooptical hardware contraints are more important than the software ones in oposition to what happens in other systems namely those using fringe projection.
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Manuel Filipe M. Costa, Jose B. Almeida, "Optical microtopographer for rough surfaces," Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34864