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4 September 2024 Laser annealing optimization of hydrothermally grown VO2 infrared detectors for applications in intelligent manufacturing
Li Lin, Yajie Zhang, Weiqi Sun, Zhiming Wang, Weixun Zhang, Jie Wei, Chunxiao Zhang, Yanhong Zhou
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Proceedings Volume 13259, International Conference on Automation Control, Algorithm, and Intelligent Bionics (ACAIB 2024); 132593O (2024) https://doi.org/10.1117/12.3039781
Event: Fourth International Conference on Automation Control, Algorithm, and Intelligent Bionics (ICAIB 2024), 2024, Yinchuan, China
Abstract
With the continuous advancement of technology, infrared detection technology has become increasingly important in various fields, and the demand for high-performance infrared detectors has also grown. VO2 thin films have attracted much attention due to their significant changes in resistance and transmittance during phase transitions, especially their high sensitivity to infrared light irradiation at room temperature. In this study, vanadium dioxide (VO2) thin films were successfully grown on single-crystal sapphire (Al2O3) substrates using the hydrothermal method, and the optoelectronic performance of the films was optimized by laser annealing technology. Experimental results show that by adjusting the power of the laser annealing, VO2 thin films with a good response to 1064 nm infrared light can be obtained. Under a light intensity of 20%, the photocurrent of the film can reach 61.4 μA, which is an increase of 36.4 μA compared to before annealing. The film also exhibits periodic current changes under periodic infrared light irradiation, demonstrating its structural stability and optoelectronic cycling performance. Under the same infrared light irradiation, a larger photocurrent can be generated. This study provides a more cost-effective and sensitive approach for intelligent manufacturing fields such as night-time intelligent driving and the application of intelligent infrared focal plane.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Li Lin, Yajie Zhang, Weiqi Sun, Zhiming Wang, Weixun Zhang, Jie Wei, Chunxiao Zhang, and Yanhong Zhou "Laser annealing optimization of hydrothermally grown VO2 infrared detectors for applications in intelligent manufacturing", Proc. SPIE 13259, International Conference on Automation Control, Algorithm, and Intelligent Bionics (ACAIB 2024), 132593O (4 September 2024); https://doi.org/10.1117/12.3039781
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KEYWORDS
Annealing
Infrared radiation
Thin films
Infrared detectors
Crystals
Laser applications
Optoelectronics
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