Paper
13 November 2024 Thermomechanical simulation and experimental investigations of fused silica with microsecond-pulsed CO2 laser cleaning
Author Affiliations +
Proceedings Volume 13280, Advanced Optical Manufacturing Technologies and Applications 2024; and Fourth International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2024); 1328002 (2024) https://doi.org/10.1117/12.3046003
Event: Second Conference on Advanced Optical Manufacturing Technologies and Applications & Fourth Forum of Young Scientists on Advanced Optical Manufacturing, 2024, Xi'an, China
Abstract
Laser cleaning is widely used to remove surface contaminants and defects due to its low cost, high efficiency, and environmental protection. However, residual thermal stress caused by huge temperature gradient significantly induces thermal distortion and cracks. Due to the lack of understanding of the coupling interaction between laser and fused silica, it is still challenging to reveal the mechanism of thermal stress formation, severely restricting the further development of laser cleaning. In this article, we built a three-dimensional thermo-mechanical model to obtain the stress value and distribution of thermal stress and reveal the evolution mechanism of stress in different times and spaces. Moreover, laser cleaning experiments under different processing parameters were carried out to validate the simulated results, and theoretical simulations fit well with experimental results, which proves the effectiveness of the multi-physics model. This research provides new insights into thermal stress evolution, which can promote further development in laser cleaning technology.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Yichi Han, Xiaocong Peng, Songlin Wan, Chaoyang Wei, and Jianda Shao "Thermomechanical simulation and experimental investigations of fused silica with microsecond-pulsed CO2 laser cleaning", Proc. SPIE 13280, Advanced Optical Manufacturing Technologies and Applications 2024; and Fourth International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2024), 1328002 (13 November 2024); https://doi.org/10.1117/12.3046003
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KEYWORDS
Silica

Gas lasers

Laser processing

Pulsed laser operation

Birefringence

Carbon monoxide

3D modeling

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