Nomarski viewing system for an optical surface profiler

Joseph Bietry; R. Anthony Auriemma; Thomas C. Bristow; Edward Merritt

doi:10.1117/12.51102

1 January 1991 Nomarski viewing system for an optical surface profiler

Joseph Bietry, R. Anthony Auriemma, Thomas C. Bristow, Edward Merritt

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51102
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

A CCD camera system has been added to a surface profiler to display Nomarski enhanced images of a surface under test. The viewing system provides an expanded view of the test surface for identifying the location and extent of surface features. Practical engineering considerations of the optical and illumination systems will be discussed. Also, examples of surface images and their respective profile scans will be shown.

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Joseph Bietry, R. Anthony Auriemma, Thomas C. Bristow, and Edward Merritt "Nomarski viewing system for an optical surface profiler", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51102

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