Process control sensor development for the automation of single-wafer processors

Jimmy W. Hosch

doi:10.1117/12.48945

1 March 1991 Process control sensor development for the automation of single-wafer processors

Jimmy W. Hosch

Proceedings Volume 1392, Advanced Techniques for Integrated Circuit Processing; (1991) https://doi.org/10.1117/12.48945
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

A review of the progress in the selection and development of appropriate process control sensors for single wafer processor automation will be presented. Categories of sensors will be defmed and their use in process control described. Issues surrounding the development of key sensors will be discussed.

Citation Download Citation

Jimmy W. Hosch "Process control sensor development for the automation of single-wafer processors", Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); https://doi.org/10.1117/12.48945

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