Rapid thermal processing in the manufacturing technology of contacts to InP-based photonic devices

Avishay Katz

doi:10.1117/12.25692

1 April 1991 Rapid thermal processing in the manufacturing technology of contacts to InP-based photonic devices

Avishay Katz

Proceedings Volume 1393, Rapid Thermal and Related Processing Techniques; (1991) https://doi.org/10.1117/12.25692
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

Rapid thermal alloying and sintering of metal ohmic contacts such as AuBe PtTFi and W to InP-based materials is shown to perform with better electrical properties than the same contacts heated by means of conventional furnace. The metalsemiconductor interfacial reactions induced by the rapid thermal processing were much shallower than those formed during the conventional heating cycle at the same temperature however with a negligible influence on the overall stresses developed in the film. These results demonstrate the superiority of the rapid thermal processing over the conventional furnace heating in sintering the metal electrical contacts and its potential while integrated into the overall manufacturing process sequence of the InP based photonic devices.

Citation Download Citation

Avishay Katz "Rapid thermal processing in the manufacturing technology of contacts to InP-based photonic devices", Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); https://doi.org/10.1117/12.25692

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