Continuous TEM observation of diamond nucleus growth by side-view method

Yasuyuki Gotoh; Kazuaki Kurihara; Yumiko Sawamoto; Toshisuke Kitakohji

doi:10.1117/12.48279

1 December 1991 Continuous TEM observation of diamond nucleus growth by side-view method

Yasuyuki Gotoh, Kazuaki Kurihara, Yumiko Sawamoto, Toshisuke Kitakohji

Proceedings Volume 1534, Diamond Optics IV; (1991) https://doi.org/10.1117/12.48279
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

The growth of diamond particles using continuous transmission electron microscope (TEM) observation of a side-view of the sample was studied. Diamonds were synthesized using the DC plasma jet chemical vapor deposition (CVD). Synthesis was followed by TEM observation and this cycle was repeated. The shape of the diamond remained almost the same during growth and there were many small SiC particles on the Si surface. Analysis of this continuous observation suggested there was a thin (about 200 nm) gaseous layer containing CH₄ radicals and SiH₄ radicals. It appeared the SiC particles helped diamond particle growth on the Si substrate.

Citation Download Citation

Yasuyuki Gotoh, Kazuaki Kurihara, Yumiko Sawamoto, and Toshisuke Kitakohji "Continuous TEM observation of diamond nucleus growth by side-view method", Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); https://doi.org/10.1117/12.48279

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