Rapid optical figuring of aspherical surfaces with plasma-assisted chemical etching

Lynn David Bollinger; G. Steinberg; Charles B. Zarowin

doi:10.1117/12.58037

26 March 1992 Rapid optical figuring of aspherical surfaces with plasma-assisted chemical etching

Lynn David Bollinger, G. Steinberg, Charles B. Zarowin

Proceedings Volume 1618, Large Optics II; (1992) https://doi.org/10.1117/12.58037
Event: Optics Rochester: SPIE's International Symposium on Imaging, Fabrication, and Competitiveness, 1991, Rochester, NY, United States

Abstract

Programmed motion of a tool which removes material by plasma assisted chemical etching (PACE) gives controlled, deterministic figuring. The process has been automated to correct arbitrary figure errors on aspheric surfaces directly from the measured surface data. A system is now operating for figuring aspheric surfaces up to 0.5 m diameter. PACE can greatly reduce the time and cost of figuring large optics by its rapid convergence to the final figure requiring only two to three measurement/figuring cycles to reach 1/50 wave surfaces. PACE intrinsically smooths high frequency roughness with material removal leaving a surface free of subsurface damage

Citation Download Citation

Lynn David Bollinger, G. Steinberg, and Charles B. Zarowin "Rapid optical figuring of aspherical surfaces with plasma-assisted chemical etching", Proc. SPIE 1618, Large Optics II, (26 March 1992); https://doi.org/10.1117/12.58037

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