Efficient Fourier image analysis algorithm for aligned rectangular and trapezoidal wafer structures

Chiao-Fe Shu; Ramesh C. Jain

doi:10.1117/12.130300

1 August 1992 Efficient Fourier image analysis algorithm for aligned rectangular and trapezoidal wafer structures

Chiao-Fe Shu, Ramesh C. Jain

Proceedings Volume 1661, Machine Vision Applications in Character Recognition and Industrial Inspection; (1992) https://doi.org/10.1117/12.130300
Event: SPIE/IS&T 1992 Symposium on Electronic Imaging: Science and Technology, 1992, San Jose, CA, United States

Abstract

We present an efficient algorithm to compute the critical dimensions of aligned rectangular and trapezoidal wafer structures using images generated by a Fourier imaging system. We show that the Fourier images of aligned rectangular and trapezoidal structures are separable functions. This allows us to project them onto x and y coordinates and simplifies the computation process. We compute the critical dimensions of rectangular structures by estimating the distance between either peaks or zeros, or by estimating the distance between zeros for trapezoidal structures. For each projected 1-dimensional signal, we apply a zero- crossing technique to find the peaks or zeros, and then compute the critical dimensions at sub- pixel resolution.

Citation Download Citation

Chiao-Fe Shu and Ramesh C. Jain "Efficient Fourier image analysis algorithm for aligned rectangular and trapezoidal wafer structures", Proc. SPIE 1661, Machine Vision Applications in Character Recognition and Industrial Inspection, (1 August 1992); https://doi.org/10.1117/12.130300

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available