Real-time surface roughness measurement under speckle pattern illumination

Kiyoshi Nakagawa; Takeaki Yoshimura; Takumi Minemoto

doi:10.1117/12.132114

20 October 1992 Real-time surface roughness measurement under speckle pattern illumination

Kiyoshi Nakagawa, Takeaki Yoshimura, Takumi Minemoto

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132114
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

A useful and excellent method to measure the surface roughness in a real time has been proposed and investigated. In the method, the real-time Fourier transformation of doubly scattered speckle pattern is used.

Citation Download Citation

Kiyoshi Nakagawa, Takeaki Yoshimura, and Takumi Minemoto "Real-time surface roughness measurement under speckle pattern illumination", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132114

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available