Paper
22 January 1993 Stable vacuum UV CCD detectors designed for space flight experiments
Dennis George Socker, Mike Marchywka, Gordon Charles Taylor, Peter A. Levine, R. Rios, Frank V. Shallcross, Gary W. Hughes
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Abstract
Thinned, backside-illuminated, p-channel CCD images are under development which can exploit the surface potential in VUV applications, yielding enhanced quantum efficiency to wavelengths as short as 1100 A. The current goal is production of large-format, 5-micron pixel imagers for spectrographic and imaging VUV spaceflight experiments. Model predictions of the effect of device design on quantum efficiency, well capacity, and crosstalk are presented for such 5-micron-approaching pixel sizes.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dennis George Socker, Mike Marchywka, Gordon Charles Taylor, Peter A. Levine, R. Rios, Frank V. Shallcross, and Gary W. Hughes "Stable vacuum UV CCD detectors designed for space flight experiments", Proc. SPIE 1764, Ultraviolet Technology IV, (22 January 1993); https://doi.org/10.1117/12.140851
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KEYWORDS
Vacuum ultraviolet

Charge-coupled devices

Quantum efficiency

Sensors

Imaging systems

Ultraviolet radiation

Oxides

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