Micro phase-shifting interferometer for surface measurement

Hans-Joerg Heimbeck

doi:10.1117/12.140968

1 January 1993 Micro phase-shifting interferometer for surface measurement

Hans-Joerg Heimbeck

Proceedings Volume 1781, Specification and Measurement of Optical Systems; (1993) https://doi.org/10.1117/12.140968
Event: Optical Systems Design '92, 1992, Berlin, Germany

Abstract

Design and application of a rigid miniaturized phase shift interferometer is presented. The matchbox size instrument has a Twyman-Green setup and an integrated CCD camera. A standard HeNe laser supplies the light through a monomode fiber. The advantages in measuring big and small objects are discussed. The sensor-like instrument can even be integrated into manufacturing equipment.

Citation Download Citation

Hans-Joerg Heimbeck "Micro phase-shifting interferometer for surface measurement", Proc. SPIE 1781, Specification and Measurement of Optical Systems, (1 January 1993); https://doi.org/10.1117/12.140968

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