Microfabricated optical chopper

Michael T. Ching; Reid A. Brennen; Richard M. White

doi:10.1117/12.165705

15 December 1993 Microfabricated optical chopper

Michael T. Ching, Reid A. Brennen, Richard M. White

Proceedings Volume 1992, Miniature and Micro-Optics and Micromechanics; (1993) https://doi.org/10.1117/12.165705
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

A micromachined chopper has demonstrated modulation of coherent and incoherent light. The chopper uses an electro-statically driven lateral micromotor to actuate a shutter plate across a through-substrate window. Test devices have been fabricated and exhibit operating frequencies ranging from 1 to 31 kHz and have stable defection amplitudes of 400 micrometers . Further optimizations of the design are discussed.

Citation Download Citation

Michael T. Ching, Reid A. Brennen, and Richard M. White "Microfabricated optical chopper", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165705

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