Effect of fabrication errors on binary phase grating

Zhenwu Lu; Longsheng Qian; Jianghong Liao; Zhicheng Weng

doi:10.1117/12.163658

25 November 1993 Effect of fabrication errors on binary phase grating

Zhenwu Lu, Longsheng Qian, Jianghong Liao, Zhicheng Weng

Proceedings Volume 2000, Current Developments in Optical Design and Optical Engineering III; (1993) https://doi.org/10.1117/12.163658
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Based on scale diffraction theory, binary phase gratings are designed and the effect of fabrication errors on the diffraction efficiency and uniformity is discussed. The theoretical and numerical analysis shows that (0, non-(pi) ) grating is more sensitive to phase delay error than (0, (pi) ) grating. Patterning error is very complex to analyze, but we can give a maximum intensity deviation to the grating.

Citation Download Citation

Zhenwu Lu, Longsheng Qian, Jianghong Liao, and Zhicheng Weng "Effect of fabrication errors on binary phase grating", Proc. SPIE 2000, Current Developments in Optical Design and Optical Engineering III, (25 November 1993); https://doi.org/10.1117/12.163658

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