Optical constants of sputtered ZrN films for heat mirror applications

Monica Veszelei; Kent E. Andersson; Arne Roos; Carl-Gustaf Ribbing

doi:10.1117/12.161968

22 October 1993 Optical constants of sputtered ZrN films for heat mirror applications

Monica Veszelei, Kent E. Andersson, Arne Roos, Carl-Gustaf Ribbing

Proceedings Volume 2017, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XII; (1993) https://doi.org/10.1117/12.161968
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Opaque and semi-transmitting film of ZrN have been reactively magnetron sputtered and their optical performance for solar control coating applications evaluated. The optical constants of the opaque films were determined from near normal reflectance measurements and Kramers- Kronig calculations over the interval 0.23 - 3.0 micrometers . The thin film optical constants were determined with combined R- and T-measurements. Systematic variations with growth conditions were observed. Thin films were observed to have higher n-values in the visible, a change that could be partly compensated by substrate heating. For the triple layers: glass / ZrO₂ / ZrN / Zro₂ it was noted that the crystallinity of the first oxide did not influence the refractive index of this oxide, but improved significantly the selectivity of the nitride growing upon it. Triple layers for solar control applications with 57% luminous transmittance and close to 1/3 each of solar transmittance, reflectance and absorption have been realized.

Citation Download Citation

Monica Veszelei, Kent E. Andersson, Arne Roos, and Carl-Gustaf Ribbing "Optical constants of sputtered ZrN films for heat mirror applications", Proc. SPIE 2017, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XII, (22 October 1993); https://doi.org/10.1117/12.161968

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