New scheme of measuring roughness

Ben-He Jiang; Wenyi Chen; Xue-Jin Liang; Sheng-Jun Du

doi:10.1117/12.156320

22 September 1993 New scheme of measuring roughness

Ben-He Jiang, Wenyi Chen, Xue-Jin Liang, Sheng-Jun Du

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156320
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

The monochromatic light projects on Michelso interference device and the detective plane on output obtains the interference pattern. Processing the information of the changes of the interference pattern and intensity distribution we can devise a new instrument for measuring roughness and obtain precise measured results.

Citation Download Citation

Ben-He Jiang, Wenyi Chen, Xue-Jin Liang, and Sheng-Jun Du "New scheme of measuring roughness", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156320

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