Resonant integrated micromachined (RIMS) acoustic sensor development

Jeffrey N. Schoess; J. David Zook; David W. Burns

doi:10.1117/12.173956

1 May 1994 Resonant integrated micromachined (RIMS) acoustic sensor development

Jeffrey N. Schoess, J. David Zook, David W. Burns

Proceedings Volume 2191, Smart Structures and Materials 1994: Smart Sensing, Processing, and Instrumentation; (1994) https://doi.org/10.1117/12.173956
Event: 1994 North American Conference on Smart Structures and Materials, 1994, Orlando, FL, United States

Abstract

Future advanced fixed- and rotary-wing aircraft, launch vehicles, and spacecraft will incorporate fiber-optic smart sensor networks to monitor structural integrity and manage overall structural health. This paper describes the design of an acoustic emission (AE)-based micromachined sensor for new and aging aircraft applications to assess preflight readiness, in- flight structural integrity, and post-flight time-based maintenance. This unique sensor approach combines silicon micromachining, free-space optical waveguides, high-speed optical interconnects, and supervisory sensor management to measure stress waves related to AE events. A unique second-generation polysilicon resonant microbeam sensor design is described. It incorporates a micron-level vacuum-encapsulated microbeam to optically sense structural-integrity acoustic parameters and to optically excite the sensor pickoff. Its principal of operation, significant payoffs and benefits, and wafer-level laboratory test data results are summarized.

Citation Download Citation

Jeffrey N. Schoess, J. David Zook, and David W. Burns "Resonant integrated micromachined (RIMS) acoustic sensor development", Proc. SPIE 2191, Smart Structures and Materials 1994: Smart Sensing, Processing, and Instrumentation, (1 May 1994); https://doi.org/10.1117/12.173956

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