Paper
4 November 1994 Resistance of coated optics to UV laser irradiation
Author Affiliations +
Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192149
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France
Abstract
Today there is hardly any product in the optical industry without the implication of optical coatings. Mainly in the UV spectral region, laser-induced damage thresholds (LIDT) of these coatings are a limiting factor for the development of a cost-effective resonator, beam relay, and mask imaging optics. Based on state-of-the-art LIDT knowledge, high-reflective and antireflective coatings for high-power excimer lasers were investigated. Some rules for preparing interference coatings with very high UV-LIDT will be given.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Norbert Kaiser "Resistance of coated optics to UV laser irradiation", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192149
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Cited by 7 scholarly publications.
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KEYWORDS
Optical coatings

Ultraviolet radiation

Absorption

Thin film coatings

Thin films

UV optics

Excimer lasers

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