X-ray investigation of supersmooth surfaces

Igor V. Kozhevnikov; Victor E. Asadchikov; B. M. Alaudinov; Albert Yu. Karabekov; Alexander V. Vinogradov

doi:10.1117/12.192144

4 November 1994 X-ray investigation of supersmooth surfaces

Igor V. Kozhevnikov, Victor E. Asadchikov, B. M. Alaudinov, Albert Yu. Karabekov, Alexander V. Vinogradov

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192144
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

The possibilities of X-ray scattering methods are demonstrated for the quantitative study of supersmooth surface microgeometry. It is shown that the model of a surface which takes into account layered inhomogeneities near a surface enables one to obtain better agreement between theory and experiment in comparison with the step-like model of a surface which widely used elsewhere.

Citation Download Citation

Igor V. Kozhevnikov, Victor E. Asadchikov, B. M. Alaudinov, Albert Yu. Karabekov, and Alexander V. Vinogradov "X-ray investigation of supersmooth surfaces", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192144

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